Neural networks applied to the determination of thickness and defocus from High Resolution Transmission Electron Microscopy images

نویسندگان

  • P L Galindo
  • A Ponce
  • S I Molina
چکیده

In this paper we show how neural networks can be used as powerful tools for quantitative extraction of relevant information from high resolution transmission electron microscopy (HRTEM) images. Different data preprocessing and modelling strategies (including Multilayer Perceptrons and Probabilistic Neural Networks) were analyzed. The methodology has been applied to the determination of thickness and defocus from HRTEM images corresponding to GaN structures with wurtzite crystalline structure using a field emission gun JEOL 2010F equipped with an energy filter.

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تاریخ انتشار 2003